The business organisation, Scottish Enterprise, has said one of its programmes created, or safeguarded, 7,000 Scottish jobs in the last year.
The body said it gave £52m of Regional Selective Assistance (RSA) to 114 companies.
This is the first year Scottish Enterprise has been responsible for awarding the RSA grants.
The largest, of £7m, was to HP Enterprise services which created 700 jobs in Erskine.
Scottish Enterprise said 55% of grants were awarded to Scottish-owned companies.
They included £630,000 to the timber firm James Callander & Son and £600,000 to the BenRiach Distillery.
The number of awards has increased from 88 during 2008/2009 to 114 in the latest financial year.
The enterprise body said manufacturing benefited considerably with the grants supporting 2,000 jobs.
The chairman of Scottish Enterprise, Crawford Gillies, said he was "delighted" that more than half grants went to Scottish firms.
He added: "Integrating these grants with our wider package of company support has made it easier to target Scotland's most ambitious companies, while at the same time helping to build a stronger, more globally competitive economy."
Mr Gillies said RSA also played an important part in attracting firms to Scotland.
He said: "Many businesses have options as to where they locate and competition with other countries and regions has never been fiercer.
"These results clearly demonstrate that Scotland continues to be a highly attractive and competitive location on the global stage."