Germany 1-1 France (5-4 pens)
Two-time winners Germany beat France on penalties in Montreal to set up a Women's World Cup semi-final against the United States.
Louisa Necib put France ahead in the second half with a deflected shot but Celia Sasic converted a controversial penalty six minutes from time.
In extra time French substitute Gaetane Thiney missed a sitter from close range as the match went to penalties.
Claire Lavogez missed the deciding kick as Germany won the shootout 5-4.
It was the first time a Women's World Cup game involving Germany had gone to penalties.
But like their male counterparts, who have made a habit of winning shootouts, they appeared nerveless as they converted all five of their spot-kicks to advance.
Germany are the reigning European champions and, as the top-ranked side in the world, were favourites to beat the third-ranked French.
But it was France who dominated early on, almost scoring after 49 seconds through Necib, who stabbed her shot wide.
She went close again before the break, but her hooked effort was pushed behind by Germany goalkeeper Nadine Angerer.
German substitute Dzsenifer Marozsan went close in he second half but her free-kick was well saved by Sarah Bouhaddi.
France's dominance eventually paid dividends when they took the lead through Necib's right-footed shot from the edge of the box, which took a decisive deflection off Annike Krahn and spun past Angerer.
They looked set to hold on to a surprise victory until, with six minutes remaining, Leonie Maier's cross struck the arm of left-back Amel Majri.
Sasic was typically composed from 12 yards to score her sixth goal of the tournament.
France would have one more glorious chance to win the match when, with five minutes remaining in extra time, Jessica Houara crossed to the unmarked Thiney.
But with the goal gaping, she somehow managed to prod wide from six yards.
That miss meant penalties, and nine were scored before Angerer saved from Lavogez to send Germany into their first semi-final since winning the tournament in 2007.
They will meet the United States, who reached their seventh consecutive World Cup semi-final with a 1-0 win over China.
- 20GoeßlingBooked at 68minsSubstituted forBehringerat 79'minutes
- 16LeupolzBooked at 91mins
- 11MittagBooked at 37minsSubstituted forMarozsánat 45'minutesBooked at 68mins
- 18PoppSubstituted forDäbritzat 70'minutes
- 4GeorgesBooked at 57mins
- 12ThomisSubstituted forLavogezat 69'minutes
- 14Necib Cadamuro
- 18DelieBooked at 55minsSubstituted forHamraouiat 101'minutes
- 9Le SommerSubstituted forThineyat 90'minutes
- 19Mbock Bathy
- Carol Anne Chenard
- Shots on Target